IndiumV3, Main, Repository, bibRecord, 002012

Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

Identifieur interne : 002012 ( Main/Repository ); précédent : 002011; suivant : 002013

Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

Auteurs : RBID : Pascal:12-0326359

Descripteurs français

Pascal (Inist)
- Nettoyage surface, Spectre photoélectron RX.

English descriptors

KwdEn :
- Surface cleaning, X-ray photoelectron spectra.

Abstract

Effects of atmospheric filament-free diffuse plasma in ambient air and oxygen by Diffuse Coplanar Surface Barrier Discharge (DCSBD) on surface of indium tin oxide (ITO) were studied. The DCSBD plasma treatment resulted in significant reduction of water contact angles (even for 1 s long treatment). The decrease can be explained by the chemical changes on surface. These were studied by XPS which shows considerable decrease in the carbon surface concentration. The detailed analysis of C1s peak indicates the increase of the highest binding energy component of the C1s peak that corresponds to polar bonds with oxygen, which may be also related to decrease of water contact angle. AFM measurement showed no significant effect of plasma on ITO surface morphology.

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Pascal:12-0326359

Le document en format XML

<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en" level="a">Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning</title>
<author><name sortKey="Homola, Tomas" uniqKey="Homola T">Tomas Homola</name>
<affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Department of Experimental Physics, Faculty of Mathematics. Physics and Informatics, Comenius University, Mlynská dolina</s1>
<s2>842 48 Bratislava</s2>
<s3>SVK</s3>
<sZ>1 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>6 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Slovaquie</country>
<wicri:noRegion>842 48 Bratislava</wicri:noRegion>
</affiliation>
<affiliation wicri:level="1"><inist:fA14 i1="02"><s1>Surface Technology Group, Singapore Institute of Manufacturing Technology, 71 Nanyang Drive</s1>
<s2>Singapore 638075</s2>
<s3>SGP</s3>
<sZ>1 aut.</sZ>
</inist:fA14>
<country>Singapour</country>
<wicri:noRegion>Singapore 638075</wicri:noRegion>
</affiliation>
</author>
<author><name sortKey="Matousek, Jind Ich" uniqKey="Matousek J">Jind Ich Matousek</name>
<affiliation wicri:level="1"><inist:fA14 i1="03"><s1>Department of Physics, Faculty of Science, J.E. Purkinje University, České mládeže 8</s1>
<s2>400 96 Ústí nad Labem</s2>
<s3>CZE</s3>
<sZ>2 aut.</sZ>
<sZ>5 aut.</sZ>
</inist:fA14>
<country>République tchèque</country>
<wicri:noRegion>400 96 Ústí nad Labem</wicri:noRegion>
</affiliation>
</author>
<author><name sortKey="Medvecka, Veronika" uniqKey="Medvecka V">Veronika Medvecka</name>
<affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Department of Experimental Physics, Faculty of Mathematics. Physics and Informatics, Comenius University, Mlynská dolina</s1>
<s2>842 48 Bratislava</s2>
<s3>SVK</s3>
<sZ>1 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>6 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Slovaquie</country>
<wicri:noRegion>842 48 Bratislava</wicri:noRegion>
</affiliation>
</author>
<author><name sortKey="Zahoranova, Anna" uniqKey="Zahoranova A">Anna Zahoranova</name>
<affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Department of Experimental Physics, Faculty of Mathematics. Physics and Informatics, Comenius University, Mlynská dolina</s1>
<s2>842 48 Bratislava</s2>
<s3>SVK</s3>
<sZ>1 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>6 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Slovaquie</country>
<wicri:noRegion>842 48 Bratislava</wicri:noRegion>
</affiliation>
</author>
<author><name sortKey="Kormunda, Martin" uniqKey="Kormunda M">Martin Kormunda</name>
<affiliation wicri:level="1"><inist:fA14 i1="03"><s1>Department of Physics, Faculty of Science, J.E. Purkinje University, České mládeže 8</s1>
<s2>400 96 Ústí nad Labem</s2>
<s3>CZE</s3>
<sZ>2 aut.</sZ>
<sZ>5 aut.</sZ>
</inist:fA14>
<country>République tchèque</country>
<wicri:noRegion>400 96 Ústí nad Labem</wicri:noRegion>
</affiliation>
</author>
<author><name sortKey="Kovacik, Du An" uniqKey="Kovacik D">Du An Kovacik</name>
<affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Department of Experimental Physics, Faculty of Mathematics. Physics and Informatics, Comenius University, Mlynská dolina</s1>
<s2>842 48 Bratislava</s2>
<s3>SVK</s3>
<sZ>1 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>6 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Slovaquie</country>
<wicri:noRegion>842 48 Bratislava</wicri:noRegion>
</affiliation>
<affiliation wicri:level="1"><inist:fA14 i1="04"><s1>R&D Center for Low-Cost Plasma and Nanotechnology Surface Modification, Masaryk University, Kotlářská 2</s1>
<s2>611 37 Brno</s2>
<s3>CZE</s3>
<sZ>6 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>République tchèque</country>
<wicri:noRegion>611 37 Brno</wicri:noRegion>
</affiliation>
</author>
<author><name sortKey="Cernak, Mirko" uniqKey="Cernak M">Mirko Cernak</name>
<affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Department of Experimental Physics, Faculty of Mathematics. Physics and Informatics, Comenius University, Mlynská dolina</s1>
<s2>842 48 Bratislava</s2>
<s3>SVK</s3>
<sZ>1 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>6 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Slovaquie</country>
<wicri:noRegion>842 48 Bratislava</wicri:noRegion>
</affiliation>
<affiliation wicri:level="1"><inist:fA14 i1="04"><s1>R&D Center for Low-Cost Plasma and Nanotechnology Surface Modification, Masaryk University, Kotlářská 2</s1>
<s2>611 37 Brno</s2>
<s3>CZE</s3>
<sZ>6 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>République tchèque</country>
<wicri:noRegion>611 37 Brno</wicri:noRegion>
</affiliation>
</author>
</titleStmt>
<publicationStmt><idno type="inist">12-0326359</idno>
<date when="2012">2012</date>
<idno type="stanalyst">PASCAL 12-0326359 INIST</idno>
<idno type="RBID">Pascal:12-0326359</idno>
<idno type="wicri:Area/Main/Corpus">001989</idno>
<idno type="wicri:Area/Main/Repository">002012</idno>
</publicationStmt>
<seriesStmt><idno type="ISSN">0169-4332</idno>
<title level="j" type="abbreviated">Appl. surf. sci.</title>
<title level="j" type="main">Applied surface science</title>
</seriesStmt>
</fileDesc>
<profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Surface cleaning</term>
<term>X-ray photoelectron spectra</term>
</keywords>
<keywords scheme="Pascal" xml:lang="fr"><term>Nettoyage surface</term>
<term>Spectre photoélectron RX</term>
</keywords>
</textClass>
</profileDesc>
</teiHeader>
<front><div type="abstract" xml:lang="en">Effects of atmospheric filament-free diffuse plasma in ambient air and oxygen by Diffuse Coplanar Surface Barrier Discharge (DCSBD) on surface of indium tin oxide (ITO) were studied. The DCSBD plasma treatment resulted in significant reduction of water contact angles (even for 1 s long treatment). The decrease can be explained by the chemical changes on surface. These were studied by XPS which shows considerable decrease in the carbon surface concentration. The detailed analysis of C1s peak indicates the increase of the highest binding energy component of the C1s peak that corresponds to polar bonds with oxygen, which may be also related to decrease of water contact angle. AFM measurement showed no significant effect of plasma on ITO surface morphology.</div>
</front>
</TEI>
<inist><standard h6="B"><pA><fA01 i1="01" i2="1"><s0>0169-4332</s0>
</fA01>
<fA03 i2="1"><s0>Appl. surf. sci.</s0>
</fA03>
<fA05><s2>258</s2>
</fA05>
<fA06><s2>18</s2>
</fA06>
<fA08 i1="01" i2="1" l="ENG"><s1>Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning</s1>
</fA08>
<fA11 i1="01" i2="1"><s1>HOMOLA (Tomas)</s1>
</fA11>
<fA11 i1="02" i2="1"><s1>MATOUSEK (Jindřich)</s1>
</fA11>
<fA11 i1="03" i2="1"><s1>MEDVECKA (Veronika)</s1>
</fA11>
<fA11 i1="04" i2="1"><s1>ZAHORANOVA (Anna)</s1>
</fA11>
<fA11 i1="05" i2="1"><s1>KORMUNDA (Martin)</s1>
</fA11>
<fA11 i1="06" i2="1"><s1>KOVACIK (Dušan)</s1>
</fA11>
<fA11 i1="07" i2="1"><s1>CERNAK (Mirko)</s1>
</fA11>
<fA14 i1="01"><s1>Department of Experimental Physics, Faculty of Mathematics. Physics and Informatics, Comenius University, Mlynská dolina</s1>
<s2>842 48 Bratislava</s2>
<s3>SVK</s3>
<sZ>1 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>6 aut.</sZ>
<sZ>7 aut.</sZ>
</fA14>
<fA14 i1="02"><s1>Surface Technology Group, Singapore Institute of Manufacturing Technology, 71 Nanyang Drive</s1>
<s2>Singapore 638075</s2>
<s3>SGP</s3>
<sZ>1 aut.</sZ>
</fA14>
<fA14 i1="03"><s1>Department of Physics, Faculty of Science, J.E. Purkinje University, České mládeže 8</s1>
<s2>400 96 Ústí nad Labem</s2>
<s3>CZE</s3>
<sZ>2 aut.</sZ>
<sZ>5 aut.</sZ>
</fA14>
<fA14 i1="04"><s1>R&D Center for Low-Cost Plasma and Nanotechnology Surface Modification, Masaryk University, Kotlářská 2</s1>
<s2>611 37 Brno</s2>
<s3>CZE</s3>
<sZ>6 aut.</sZ>
<sZ>7 aut.</sZ>
</fA14>
<fA20><s1>7135-7139</s1>
</fA20>
<fA21><s1>2012</s1>
</fA21>
<fA23 i1="01"><s0>ENG</s0>
</fA23>
<fA43 i1="01"><s1>INIST</s1>
<s2>16002</s2>
<s5>354000509899880640</s5>
</fA43>
<fA44><s0>0000</s0>
<s1>© 2012 INIST-CNRS. All rights reserved.</s1>
</fA44>
<fA45><s0>54 ref.</s0>
</fA45>
<fA47 i1="01" i2="1"><s0>12-0326359</s0>
</fA47>
<fA60><s1>P</s1>
</fA60>
<fA61><s0>A</s0>
</fA61>
<fA64 i1="01" i2="1"><s0>Applied surface science</s0>
</fA64>
<fA66 i1="01"><s0>NLD</s0>
</fA66>
<fC01 i1="01" l="ENG"><s0>Effects of atmospheric filament-free diffuse plasma in ambient air and oxygen by Diffuse Coplanar Surface Barrier Discharge (DCSBD) on surface of indium tin oxide (ITO) were studied. The DCSBD plasma treatment resulted in significant reduction of water contact angles (even for 1 s long treatment). The decrease can be explained by the chemical changes on surface. These were studied by XPS which shows considerable decrease in the carbon surface concentration. The detailed analysis of C1s peak indicates the increase of the highest binding energy component of the C1s peak that corresponds to polar bonds with oxygen, which may be also related to decrease of water contact angle. AFM measurement showed no significant effect of plasma on ITO surface morphology.</s0>
</fC01>
<fC02 i1="01" i2="3"><s0>001B60</s0>
</fC02>
<fC02 i1="02" i2="3"><s0>001B70</s0>
</fC02>
<fC02 i1="03" i2="3"><s0>001B80</s0>
</fC02>
<fC03 i1="01" i2="3" l="FRE"><s0>Nettoyage surface</s0>
<s5>01</s5>
</fC03>
<fC03 i1="01" i2="3" l="ENG"><s0>Surface cleaning</s0>
<s5>01</s5>
</fC03>
<fC03 i1="02" i2="3" l="FRE"><s0>Spectre photoélectron RX</s0>
<s5>02</s5>
</fC03>
<fC03 i1="02" i2="3" l="ENG"><s0>X-ray photoelectron spectra</s0>
<s5>02</s5>
</fC03>
<fN21><s1>247</s1>
</fN21>
<fN44 i1="01"><s1>OTO</s1>
</fN44>
<fN82><s1>OTO</s1>
</fN82>
</pA>
</standard>
</inist>
</record>

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Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

Descripteurs français

English descriptors

Abstract

Links toward previous steps (curation, corpus...)

Links to Exploration step

Le document en format XML

Pour manipuler ce document sous Unix (Dilib)

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